Micro Electro Mechanical System (MEMS)

Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications by Kamaljeet Singh, Ayan Karmakar

• Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications
• Kamaljeet Singh, Ayan Karmakar
• Page: 0
• Format: pdf, ePub, mobi, fb2
• ISBN: 9789819661626
• Publisher: Springer-Verlag New York, LLC

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This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

Micro Electro Mechanical System (MEMS) Technology for .
This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical .
Micro Electro Mechanical System (Mems) Technology for .
Micro Electro Mechanical System (Mems) Technology for Multifaceted Applications. Kamaljeet Singh. (Author). ,. Ayan Karmakar. (Author). Book icon. Hardback.
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This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated .
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This review offers a summary of MEMS fabrication, sensing technologies, and their functional applications, emphasizing common examples in daily .
Micro Electro Mechanical System (MEMS) Technology for .
This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept .

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